Title:
PIEZO-ELECTRIC DEVICE, ITS MANUFACTURING METHOD, INK JET HEAD AND INK JET RECORDING DEVICE EQUIPPED THEREWITH
Document Type and Number:
Japanese Patent JP2003188432
Kind Code:
A
Abstract:
To provide a highly reliable piezo-electric device and its manufacturing method which has a high piezo-electric constant (d31) and good reproducibility of piezo-electric characteristics with minimum variations.
An adhesion layer 2 made of oxidizing metal is laid on a board 1. A first electrode layer 3 made of non-oxidizing metal is laid on the layer 2. A seed 5 made of oxide of the element of the adhesion layer and distributed insularly on the first electrode layer is laid on the first electrode layer. An orientation control layer 6 made of oxide is laid on the first electrode on which the seed is formed. A piezo-electric layer 7 made of oxide is laid on the layer 6. A second electrode layer 8 is laid on the piezo-electric layer.
Inventors:
TOMOSAWA ATSUSHI
FUJII AKIYUKI
TORII HIDEO
KUBO AKIKO
FUJII AKIYUKI
TORII HIDEO
KUBO AKIKO
Application Number:
JP2001384312A
Publication Date:
July 04, 2003
Filing Date:
December 18, 2001
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
B41J2/045; B41J2/055; B41J2/135; B41J2/14; B41J2/16; H01L41/08; H01L41/09; H01L41/18; H01L41/22; H01L41/29; H01L41/319; (IPC1-7): H01L41/09; B41J2/045; B41J2/055; B41J2/16; H01L41/08; H01L41/18; H01L41/22
Attorney, Agent or Firm:
Fumio Iwahashi (2 others)