Title:
圧電駆動型MEMS素子
Document Type and Number:
Japanese Patent JP5300559
Kind Code:
B2
Abstract:
A piezoelectric-driven MEMS element includes a substrate, a beam, a fixed portion, a fixed electrode portion and a power source. The beam is provided with a lower electrode film, a lower piezoelectric film, a middle electrode film, an upper piezoelectric film and an upper electrode film. The fixed portion fixes one end of the beam onto the substrate so as to hold the beam with a gap above the substrate. The fixed electrode portion has a capacitive gap between the fixed electrode portion and the other end of the beam. In addition, at least one or two of the lower electrode film, the middle electrode film and the upper electrode film is thicker than the rest thereof.
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Inventors:
Toruhiko Nishigaki
Toshihiko Nagano
Hiroshi Ohno
Takashi Kawakubo
Toshihiko Nagano
Hiroshi Ohno
Takashi Kawakubo
Application Number:
JP2009082270A
Publication Date:
September 25, 2013
Filing Date:
March 30, 2009
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01G5/16; B81B3/00; H01H57/00
Domestic Patent References:
| JP2007259669A | ||||
| JP2008091167A | ||||
| JP2005217852A | ||||
| JP2260108A | ||||
| JP2008005642A |
Attorney, Agent or Firm:
Mitsuyuki Matsuyama
Tetsuma Ikegami
Akira Sudo
Tetsuma Ikegami
Akira Sudo