Title:
圧電アクチュエータ及びこれを使用した小型流体制御装置
Document Type and Number:
Japanese Patent JP6693923
Kind Code:
B2
Abstract:
A piezoelectric actuator (13) includes a square suspension plate (130), an outer frame (131), plural brackets (132) and a square piezoelectric ceramic plate (133). The outer frame (131) is arranged around the suspension plate (130). A second surface (131a) of the outer frame (131) and a second surface (130a) of the suspension plate (130) are coplanar with each other. The plural brackets (132) are perpendicularly connected between the suspension plate (130) and the outer frame (131) for elastically supporting the suspension plate (130). Each bracket (132) has a length in a range between 1.11mm and 1.21mm and a width in a range between 0.2mm and 0.6mm. A length of the piezoelectric ceramic plate (133) is not larger than a length of the suspension plate (130). The piezoelectric ceramic plate (133) is attached on a first surface (130b) of the suspension plate (130). A miniature fluid control device comprising such piezoelectric actuator (13) is also disclosed.
Inventors:
Han Yong Long
黄 ▲けい▼峰
Chen Sechang
House
Konobu
Huang Tetsui
Toshihiro Chen
黄 ▲けい▼峰
Chen Sechang
House
Konobu
Huang Tetsui
Toshihiro Chen
Application Number:
JP2017168143A
Publication Date:
May 13, 2020
Filing Date:
September 01, 2017
Export Citation:
Assignee:
Microjet Technology Co.,Ltd.
International Classes:
H02N2/04; B06B1/06; F04B45/04; F04B45/047; H01L41/09; H01L41/187
Domestic Patent References:
| JP2012210051A | ||||
| JP2013068215A |
Foreign References:
| CN205383064U | ||||
| WO2005067346A1 |
Attorney, Agent or Firm:
Hitoshi Shinbo