Title:
PIEZOELECTRIC ACTUATOR
Document Type and Number:
Japanese Patent JP2018078792
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a portable compact fluid controller and a piezoelectric actuator for the same which improve defects of prior arts, downsize a volume of equipment and facility that once adopt a conventional fluid controller and ensure silence, and can be used conveniently and comfortably.SOLUTION: A piezoelectric actuator has: a suspended plate which is square, has side lengths from 2 mm to 4.5 mm, and can be bent and vibrate from a center part to an outer peripheral part; an outer frame installed in the way that an outside of the suspended plate is encircled; at least one frame which provides elastic support by being connected between the suspended plate and the outer frame; and a piezoelectric ceramic plate which is square, has side lengths not longer than those of the suspended plate, is stuck onto a first surface of the suspended plate, and drives the bending/vibrating of the suspended plate by using applied voltage.SELECTED DRAWING: Figure 3A
Inventors:
MOU HAO-JAN
HAN YUNG-LUNG
HUANG CHI-FENG
HAN YUNG-LUNG
HUANG CHI-FENG
Application Number:
JP2017216111A
Publication Date:
May 17, 2018
Filing Date:
November 09, 2017
Export Citation:
Assignee:
MICROJET TECHNOLOGY CO LTD
International Classes:
H02N2/04; F04B45/047; H01L41/053; H01L41/09; H01L41/25
Foreign References:
| US20140377099A1 | 2014-12-25 |
Attorney, Agent or Firm:
Hitoshi Shinbo
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