Title:
圧電アクチュエータ
Document Type and Number:
Japanese Patent JP4039744
Kind Code:
B2
Abstract:
A piezoelectric actuator includes a main driver electrode 4 and a sensor electrode 5. A feedback signal is generated from the sensor electrode 5 in order to eliminate a primary vibration mode due to a primary resonance frequency. The main driver electrode extends to a fixture portion of the actuator, the fixture portion being fitted into a support member 11. The extending portion of the main driver electrode eliminates the electromechanical coupling against a secondary vibration mode due to a second resonance frequency. Features of the piezoelectric actuator suppress the resonance phenomenon, thus improving the response characteristics of the actuator.
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Inventors:
Masaki Taniuchi
Wakatsuki Noboru
Sumio Yamada
Wakatsuki Noboru
Sumio Yamada
Application Number:
JP20069198A
Publication Date:
January 30, 2008
Filing Date:
July 15, 1998
Export Citation:
Assignee:
富士通株式会社
International Classes:
C30B29/30; G05D3/00; H01L41/04; H01L41/09; H01L41/18; H01H57/00
Domestic Patent References:
| JP6104503A | ||||
| JP5344765A | ||||
| JP7206600A | ||||
| JP6005943A | ||||
| JP6056521A |
Attorney, Agent or Firm:
Yukio Ono
Yoshio Miyagawa
Tomoko Inazumi
Yoshio Miyagawa
Tomoko Inazumi