Title:
圧電アクチュエーター
Document Type and Number:
Japanese Patent JP6387686
Kind Code:
B2
Abstract:
A piezoelectric actuator according to an embodiment includes a piezoelectric element, a vibrating plate including a main body section provided with the piezoelectric element, a fixing section, and a coupling section that couples the main body section and the fixing section, and a first member to which the vibrating plate is fixed. The fixing section is fixed to the first member by sandwiching the fixing section with the first member and a second member. In the thickness direction of the vibrating plate, each of the thicknesses of the first member and the second member is larger than the thickness of the fixing section. When viewed from the thickness direction of the vibrating plate, the main body section has a pair of sides opposed to each other. The vibrating plate includes a plurality of the coupling sections on one of the pair of sides of the main body section.
Inventors:
Koichi Uejo
Osamu Miyazawa
Yutaka Arakawa
Osamu Miyazawa
Yutaka Arakawa
Application Number:
JP2014110945A
Publication Date:
September 12, 2018
Filing Date:
May 29, 2014
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H02N2/12
Domestic Patent References:
| JP2007221865A | ||||
| JP7039178A | ||||
| JP2007189899A | ||||
| JP2013121194A | ||||
| JP2012165496A | ||||
| JP2011030375A |
Attorney, Agent or Firm:
Kazuaki Watanabe
Keisuke Nishida
Satoshi Nakai
Keisuke Nishida
Satoshi Nakai