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Title:
PIEZOELECTRIC DEVICE, PIEZOELECTRIC ACTUATOR, DROPLET EJECTING HEAD, AND DROPLET EJECTING APPARATUS
Document Type and Number:
Japanese Patent JP2011129555
Kind Code:
A
Abstract:

To provide a piezoelectric device in which the degree of freedom in selection of an electromagnetic can be made large, and to provide a piezoelectric actuator including the piezoelectric device, a droplet ejecting head, and a droplet ejecting apparatus.

The piezoelectric device includes: a first electrode layer 20 provided to overlie a substrate 10; a second electrode layer 40 disposed to face the first electrode layer 20; and a piezoelectric layer 30 disposed between the first electrode layer 20 and the second electrode layer 40. The first electrode layer 20 has a conductive layer 22 and a barrier layer 24. The barrier layer 24 is formed between the conductive layer 22 and the piezoelectric layer 30 so that the conductive layer 22 is not brought into contact with the piezoelectric layer 30.


Inventors:
OSAWA EIJI
OHASHI KOJI
HIRAI EIKI
Application Number:
JP2009283818A
Publication Date:
June 30, 2011
Filing Date:
December 15, 2009
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
H01L41/09; B41J2/045; B41J2/055; B41J2/135; B41J2/14; B41J2/145; B41J2/15; H01L41/187; H01L41/22; H01L41/29; H01L41/319
Domestic Patent References:
JP2005524230A2005-08-11
JP2006245247A2006-09-14
JP2003051583A2003-02-21
JP2006245383A2006-09-14
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi
Misa Nagata



 
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