Title:
圧電体デバイスの製造方法と液体吐出ヘッドの製造方法と液滴吐出装置の製造方法
Document Type and Number:
Japanese Patent JP4507565
Kind Code:
B2
Abstract:
To provide a method for efficiently manufacturing a piezoelectric device or a ferroelectric device, provided with a piezoelectric film or an in-plane oriented ferroelectric film in the film surface .
Lower electrodes (13, 542) are formed on substrates (11, 52), on lower electrodes, a ferroelectric film (24), or a piezoelectric film (543) is formed by an ion-beam assist method, and on the ferroelectric film or the piezoelectric film, upper electrodes (25, 541) are formed. The ferroelectric film or the piezoelectric film is formed by PZT, BST, or a relaxer material.
COPYRIGHT: (C)2004,JPO&NCIPI
Inventors:
Higuchi Tenkou
Setsuya Iwashita
Hiroshi Miyazawa
Koji Kado
Masami Murai
Setsuya Iwashita
Hiroshi Miyazawa
Koji Kado
Masami Murai
Application Number:
JP2003380094A
Publication Date:
July 21, 2010
Filing Date:
November 10, 2003
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
B41J2/16; B41J2/045; B41J2/055; B41J2/135; B41J2/14; H01L21/8246; H01L27/105; H01L41/08; H01L41/09; H01L41/18; H01L41/22; H01L41/316; H01L41/39; H02N2/00
Domestic Patent References:
| JP2002307690A | ||||
| JP2002083937A | ||||
| JP9256152A | ||||
| JP6168879A |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Kazuhiko Miyasaka
Osamu Suzawa
Kazuhiko Miyasaka