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Title:
PIEZOELECTRIC DEVICE
Document Type and Number:
Japanese Patent JP2010288249
Kind Code:
A
Abstract:

To provide a piezoelectric device, in which an element can be heated with less energy and moreover, heat transfer to the outside of a package is suppressed.

A piezoelectric device 100 includes a package 10, a piezoelectric element 20 housed inside the package 10, and a heater element 30 housed inside the package 10. The piezoelectric element 20 includes a base 22 and a beam 24 extending from the base 22 and is fixed to the base 22 in a cantilevered or double-supported beam shape; the heater element 30 includes a supporting part 32 and a heat generating part 34 supported by the support part 32 away from the package 10; and the heat-generating part 34 is fixed by the support part 32, in a cantilevered shape or double-supported shape of shape, and the heat generating part 34 and the beam 24 are mutually separated.


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Inventors:
TAMURA TOMOHIRO
Application Number:
JP2009229384A
Publication Date:
December 24, 2010
Filing Date:
October 01, 2009
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
H03H9/02; B81B3/00; H01L41/08; H01L41/09; H01L41/18
Domestic Patent References:
JP2009005117A2009-01-08
JP2001500715A2001-01-16
JP2003224422A2003-08-08
JP2000002571A2000-01-07
JPS5553210U1980-04-10
JPS55119381A1980-09-13
JP2007222990A2007-09-06
JP2009005117A2009-01-08
JP2001500715A2001-01-16
JP2003224422A2003-08-08
JP2000002571A2000-01-07
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi
Misa Nagata



 
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