Title:
圧電デバイス
Document Type and Number:
Japanese Patent JP4905853
Kind Code:
B2
Inventors:
Shimada Yoko
Masao Nomura
Masao Nomura
Application Number:
JP2006253005A
Publication Date:
March 28, 2012
Filing Date:
September 19, 2006
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H03H9/02; H01L23/00; H03B5/32; H03H3/02
Domestic Patent References:
| JP2005244671A | ||||
| JP2004297554A | ||||
| JP2005123246A |
Attorney, Agent or Firm:
Yuichi Murakami