Title:
PIEZOELECTRIC DRIVE RELAY
Document Type and Number:
Japanese Patent JP2003346627
Kind Code:
A
Abstract:
To provide a low-power, high-speed operating switch and a relay.
The piezoelectric drive relay (100) is provided with a channel (195), and piezoelectric elements (170) making up a side wall for each chamber (175) and connecting each chamber to the channel through each through-hole (180). Contact pads (200) and conductive liquids (190) are provided in the channel (195), and the conductive liquids conducting between the contact pads move by a drive of the piezoelectric elements.
Inventors:
WONG MARVIN GLENN
Application Number:
JP2003119891A
Publication Date:
December 05, 2003
Filing Date:
April 24, 2003
Export Citation:
Assignee:
AGILENT TECHNOLOGIES INC
International Classes:
H01L41/09; H01H29/02; H01H57/00; H01H29/28; (IPC1-7): H01H57/00; H01H29/02; H01L41/09
Attorney, Agent or Firm:
Masaki Goto (1 person outside)
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