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Title:
PIEZOELECTRIC DRIVE-TYPE MEMS ACTUATOR
Document Type and Number:
Japanese Patent JP2007273800
Kind Code:
A
Abstract:

To provide a piezoelectric drive-type MEMS actuator, capable of proper reproducibly and high precisely controlling the displacement amount of a piezoelectric drive by suppressing an impact of warpage due to by a residual strain of a piezoelectric film or the like.

The piezoelectric drive-type MEMS actuator is equipped with a primary actuator 11, comprising a first lower electrode 13, a first upper electrode 17 and a first piezoelectric film 14 formed so as to be inserted into the electrodes 13, 17 in which at least one end of the primary actuator 11 is fixed on a substrate 1; a primary acting portion 12 connected to the primary actuator 11; a secondary actuator 21, comprising a second lower electrode 23, having the same layer as that of the first lower electrode 13; a second piezoelectric film 24, which is formed on the second lower electrode 23 and has the same layer as that of the first piezoelectric film 14, and a second upper electrode 27 which is formed on the second piezoelectric film 24 and has the same layer as that of the first upper electrode 17, in which at least one end of the secondary actuator 21 is fixed on the substrate 1 and the secondary actuator 21 is arranged in parallel with the primary actuator 11; and a secondary acting portion 22 connected to the secondary actuator 21, wherein an electrical circuit element is constituted by the primary acting portion 12 and the secondary acting portion 22.

COPYRIGHT: (C)2008,JPO&INPIT


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Inventors:
NISHIGAKI MICHIHIKO
NAGANO TOSHIHIKO
MIYAZAKI TAKASHI
ITAYA KAZUHIKO
KAWAKUBO TAKASHI
Application Number:
JP2006098556A
Publication Date:
October 18, 2007
Filing Date:
March 31, 2006
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H01L41/09; B81B3/00; H01H57/00; H02N2/00
Domestic Patent References:
JP2006087231A2006-03-30
JPH06111971A1994-04-22
JPH10189393A1998-07-21
JPH06150405A1994-05-31
JP2002373829A2002-12-26
JPS50134168A1975-10-24
JPS6245824A1987-02-27
Foreign References:
WO2005059933A12005-06-30
Attorney, Agent or Firm:
Kenji Yoshitake
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki



 
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