To provide a piezoelectric drive type MEMS switch capable of suppressing deviations in a structure caused by bending of a driving part and having stable electrical characteristics and effective in power consumption saving.

The piezoelectric drive type MEMS switch 10 has a structure in which, an opposing pair of cantilevers 20, 22, in which a ground (a lower electrode) 14 and an upper electrode 18 are formed at the front and the rear of a piezoelectric layer 16 are supported on a base board 12 in cantilever form. On a shorter cantilever 22, there are formed a signal line 36 and a contact electrode 24. The signal line 34 formed on a longer cantilever 20 is extended up to a length enough to contact the contact electrode 24. Since the signal line 34 lies along the bent of the first cantilever 20, a state of a switch-ON is maintained, by pressing the contact electrode 24 in a state of non-voltage load; and since in a state of voltage being impressed, the signal line follows the cantilever 20 bent in a direction opposed to initial state, it parts with the contact electrode 24 to become a state of switch-OFF.