Title:
圧電駆動装置、モーター、ロボット、およびポンプ
Document Type and Number:
Japanese Patent JP6662007
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric driving device that can stabilize output characteristics by specifying the amount of deformation of a contact part due to a pressing force.SOLUTION: There is provided a piezoelectric driving device comprising: a substrate including a stationary part and a vibrator part that is provided with a piezoelectric element and supported by the stationary part; and a contact part that is in contact with a driving target body and transmits the movement of the vibrator part to the driving target body, in which the contact part is provided at an end in the longitudinal direction of the vibrator part; the difference between the distance between the end and a leading end of the contact part when the contact part is not pressed against the driving target body and the distance between the end and the leading end when the contact part is pressed against the driving target body is smaller than the amplitude of the longitudinal direction when the vibrator part is driven.SELECTED DRAWING: Figure 4
Inventors:
Takahashi Tomoaki
Yutaka Arakawa
Yutaka Arakawa
Application Number:
JP2015236650A
Publication Date:
March 11, 2020
Filing Date:
December 03, 2015
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H02N2/10; B25J19/00; F04B43/12; H01L41/09; H01L41/187
Domestic Patent References:
| JP2005086991A | ||||
| JP2005203725A | ||||
| JP2003008093A | ||||
| JP2013121191A | ||||
| JP2014088879A | ||||
| JP2013013218A |
Foreign References:
| CN102651623A |
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi
Mitsue Obuchi