Title:
PIEZOELECTRIC DRIVING TYPE MEMS ELEMENT AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2005313276
Kind Code:
A
Abstract:
To stably prepare a piezoelectric driving type MEMS element with high reliability.
This element is provided with a piezoelectric film 8 provided across a recessed part 2 on a substrate 1 having the recessed part 2, piezoelectric driving mechanisms 12 provided at both ends of the piezoelectric film 8 to drive the piezoelectric film 8, a movable beam 11 having a first electrode 6 provided at the center part on a surface on the substrate 1 side of the piezoelectric film 8, and a second electrode 3 provided on a flat part of the recessed part 2 of the substrate 1 to be opposed to the first electrode 6 of the movable beam 11.
Inventors:
KAWAKUBO TAKASHI
NAGANO TOSHIHIKO
ABE KAZUHIDE
NISHIGAKI MICHIHIKO
NAGANO TOSHIHIKO
ABE KAZUHIDE
NISHIGAKI MICHIHIKO
Application Number:
JP2004133736A
Publication Date:
November 10, 2005
Filing Date:
April 28, 2004
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
B81B3/00; H01G5/18; H01G7/06; H01H57/00; H01L41/08; H01L41/09; H01L41/18; H01L41/187; H01L41/22; H01L41/29; H02N1/00; H03H9/24; H01H59/00; (IPC1-7): B81B3/00; H01L41/09; H01L41/18; H01L41/187; H01L41/22; H03H9/24
Attorney, Agent or Firm:
Kenji Yoshitake
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Previous Patent: METHOD FOR MANUFACTURING MULTI-LAYER CONTAINER, TOOL, AND MULTI-LAYER CONTAINER
Next Patent: SNAP RING ASSEMBLER TO PISTON
Next Patent: SNAP RING ASSEMBLER TO PISTON