Title:
PIEZOELECTRIC ELEMENT, PIEZOELECTRIC DEVICE, AND MANUFACTURING METHOD OF THE PIEZOELECTRIC ELEMENT
Document Type and Number:
Japanese Patent JP2022119126
Kind Code:
A
Abstract:
To improve a detection accuracy.SOLUTION: A piezoelectric element is structured by including a support body 10; a piezoelectric film 50 arranged on the support body 10; and an electric film 60 fetching an electric charge generated by deforming the piezoelectric film 50 by being connected to the piezoelectric film 50. The piezoelectric element comprises a vibration part 20 having a support region 21a supported by the support body and a vibration region 22 connected to the support region 21a and floated from the support body 10, and outputting a pressure detection signal based on the electric charge. Then, in the vibration region 22, a plurality of slits is formed so as to be directed to a center part C in the vibration region 22 from the support region 21a, and both of them are supported against the support region 21a.SELECTED DRAWING: Figure 1A
Inventors:
SAKAI MINEICHI
MAWATARI KAZUAKI
KOYAMA YUJI
TANAKA MASAAKI
SHIROMORI TOMOYA
SHIMIZU YUHEI
MAWATARI KAZUAKI
KOYAMA YUJI
TANAKA MASAAKI
SHIROMORI TOMOYA
SHIMIZU YUHEI
Application Number:
JP2021016148A
Publication Date:
August 16, 2022
Filing Date:
February 03, 2021
Export Citation:
Assignee:
DENSO CORP
International Classes:
H01L41/113; H01L41/053; H01L41/187; H01L41/332; H04R1/02; H04R17/02
Attorney, Agent or Firm:
Patent Attorney Corporation Yuai Patent Office