Title:
PIEZOELECTRIC ELEMENT, PIEZOELECTRIC DEVICE, ULTRASONIC PROBE, AND ELECTRONIC APPARATUS
Document Type and Number:
Japanese Patent JP2018164039
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric element having high performance, and a piezoelectric device, an ultrasonic probe and an electronic apparatus.SOLUTION: A piezoelectric element is the piezoelectric element in which a first electrode layer, a piezoelectric layer and a second electrode layer are sequentially laminated, and comprises: a third electrode layer being laminated on a part of the second electrode layer and containing third metal; and an insulation layer covering at least a portion of the piezoelectric layer where the second electrode layer is not provided and having an opening exposing a part of the second electrode layer. In the second electrode layer, a first layer containing first metal and a second layer containing second metal are sequentially laminated. In the opening, the second layer is exposed. A difference of standard oxidation reduction potential between the second metal and the third metal is smaller than a difference of standard oxidation reduction potential between the first metal and the third metal.SELECTED DRAWING: Figure 6
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Inventors:
OHASHI KOJI
KAMIJO TAKAHIRO
IMAI KATSUHIRO
YAMAOKA TAKUSANE
KOJIMA CHIKARA
KAMIJO TAKAHIRO
IMAI KATSUHIRO
YAMAOKA TAKUSANE
KOJIMA CHIKARA
Application Number:
JP2017061440A
Publication Date:
October 18, 2018
Filing Date:
March 27, 2017
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H01L41/047; A61B8/14; B41J2/14; H01L41/09; H01L41/113; H02N2/04; H04R17/00
Domestic Patent References:
| JP2008284781A | 2008-11-27 | |||
| JP2012051325A | 2012-03-15 | |||
| JP2014172178A | 2014-09-22 |
Attorney, Agent or Firm:
Intellectual Property Office