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Title:
PIEZOELECTRIC ELEMENT DRIVE TYPE VALVE AND FLOW RATE CONTROL DEVICE INCLUDING THE SAME
Document Type and Number:
Japanese Patent JP2016050645
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric drive type valve capable of increasing a displacement amount of a piezoelectric element without using a complicated mechanism, and does not interfere with wiring or the like, and a flow rate control device including the piezoelectric element drive type valve.SOLUTION: A piezoelectric element drive type valve 1 includes a body 7 having a fluid passage 7a and a valve seat 7c, a valve body 8 contacting/separating with/from the valve seat 7c of the body 7 to open/close the flow passage 7a, and a piezoelectric actuator 16 utilizing elongation of a piezoelectric element to drive the valve body 8 in an openable/closable manner. In the piezoelectric element drive type valve, at least two piezoelectric actuators 16 are disposed linearly through a spacer 17 capable of drawing wiring.SELECTED DRAWING: Figure 1

Inventors:
HIRATA KAORU
SUGITA KATSUYUKI
DOI RYOSUKE
NISHINO KOJI
IKEDA NOBUKAZU
Application Number:
JP2014177202A
Publication Date:
April 11, 2016
Filing Date:
September 01, 2014
Export Citation:
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Assignee:
FUJIKIN KK
International Classes:
F16K31/02; F16K7/14; H01L41/053; H01L41/083; H01L41/09
Domestic Patent References:
JPH01203779A1989-08-16
JP2003534512A2003-11-18
JP2011117499A2011-06-16
Attorney, Agent or Firm:
Yata Ryuichi
Takeshi Sugimoto