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Patent Searching and Data


Title:
PIEZOELECTRIC ELEMENT AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2018170343
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric element in which an appropriate opening for making contact with a first electrode can be formed in a piezoelectric film.SOLUTION: A piezoelectric element 4 includes: a first electrode 11; a first piezoelectric film 12 that is formed on one surface of the first electrode 11 and made of a material containing AlN as a main component; and a second electrode 13 that is disposed on the surface opposite to the first electrode 11 side, of the first piezoelectric film 12. A first opening 13a that penetrates in the thickness direction is formed in the second electrode 13 in order to make contact with the first electrode 11. A second opening 12a that communicates with the first opening 13a and penetrates in the thickness direction is formed in the first piezoelectric film 12. The first opening 13a and the second opening 12a have substantially the same shape and size in a plan view as viewed from the normal direction with respect to the surface of the first electrode 11.SELECTED DRAWING: Figure 2

Inventors:
ASHIKAGA KINYA
IIDA JOJI
Application Number:
JP2017065198A
Publication Date:
November 01, 2018
Filing Date:
March 29, 2017
Export Citation:
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Assignee:
ROHM CO LTD
International Classes:
H01L41/187; H01L41/047; H01L41/09; H01L41/107; H01L41/113; H01L41/332; H03H3/02; H03H9/17; H04R17/00; H04R31/00
Attorney, Agent or Firm:
特許業務法人あい特許事務所