Title:
PIEZOELECTRIC ELEMENT, PIEZOELECTRIC MODULE, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT
Document Type and Number:
Japanese Patent JP2017117981
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric element capable of increasing a driving frequency to a high frequency, a piezoelectric module, an electronic device, and a method of manufacturing a piezoelectric element.SOLUTION: An ultrasonic transducer 20 includes: a supporting film 211, an insulating single crystal substrate 212 provided on the supporting film 211; a lower electrode 22 provided on the substrate 212; a piezoelectric body 23 provided on the lower electrode 22; and an upper electrode 24 provided on the piezoelectric body 23. A crystal plane orientation of the substrate 212 is the same as a crystal plane orientation of the piezoelectric body 23.SELECTED DRAWING: Figure 2
Inventors:
KUROKAWA KENICHI
Application Number:
JP2015253148A
Publication Date:
June 29, 2017
Filing Date:
December 25, 2015
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H01L41/187; A61B8/13; H01L41/047; H01L41/09; H01L41/113; H01L41/319; H04R17/00; H04R31/00
Attorney, Agent or Firm:
Kazuaki Watanabe
Keisuke Nishida
Satoshi Nakai
Keisuke Nishida
Satoshi Nakai