Title:
圧電素子使用装置
Document Type and Number:
Japanese Patent JPWO2011122416
Kind Code:
A
Inventors:
Masayuki Uetani
Valley 信
Valley 信
Application Number:
JP2011056994W
Publication Date:
July 08, 2013
Filing Date:
March 23, 2011
Export Citation:
Assignee:
NGK Insulators, Ltd.
International Classes:
B06B1/06; H01L41/083; H01L41/22; H01L41/187
Attorney, Agent or Firm:
Patent business corporation Pros Peck patent firm
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