Title:
PIEZOELECTRIC ELEMENT, AND PIEZOELECTRIC ELEMENT APPLICATION DEVICE
Document Type and Number:
Japanese Patent JP2023150058
Kind Code:
A
Abstract:
To provide a piezoelectric element that can improve insulating properties inside a piezoelectric layer.SOLUTION: A piezoelectric element of the present invention includes: a substrate; a first electrode formed on the substrate; a piezoelectric layer formed on the first electrode; and a second electrode formed on the piezoelectric layer, and the piezoelectric layer contains potassium, sodium, niobium, oxygen, and carbon. In secondary ion mass spectrometry inside the piezoelectric layer, the ratio of the maximum intensity of carbon to the maximum intensity of oxygen is 3.1×10-3 or more and 9.1×10-3 or less.SELECTED DRAWING: Figure 5
Inventors:
KITADA KAZUYA
OHASHI KOJI
HAMADA YASUAKI
YANO YOSHIKI
OHASHI KOJI
HAMADA YASUAKI
YANO YOSHIKI
Application Number:
JP2022058949A
Publication Date:
October 16, 2023
Filing Date:
March 31, 2022
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H10N30/853; B41J2/045; B41J2/14; C04B35/495; H10N30/079; H10N30/20; H10N30/50
Attorney, Agent or Firm:
Yasushi Matsunuma
Onami Kazunori
Hiroyuki Matsumoto
Akio Sato
Onami Kazunori
Hiroyuki Matsumoto
Akio Sato
Previous Patent: Receiving coil and magnetic resonance imaging device
Next Patent: Input devices, input methods and programs
Next Patent: Input devices, input methods and programs