Title:
PIEZOELECTRIC FILM AND PIEZOELECTRIC ELEMENT AND INK JET PRINT HEAD USING THE SAME
Document Type and Number:
Japanese Patent JP2019091917
Kind Code:
A
Abstract:
To provide a piezoelectric film having stable piezoelectric characteristics.SOLUTION: A piezoelectric film 8 includes an adhesion layer 101 formed on the surface of a lower electrode 7, a first seed layer 102 formed on the adhesion layer 101, a plurality of PZT layers 103 to 106 in units of main firing stacked on the first seed layer 102, a second seed layer 107 formed on the surface of the PZT 106 in units of main firing, and a plurality of PZT layers 108 to 112 in units of main firing formed on the surface of the second seed layer 107. The seed layers 102 and 107 are made of, for example, a PZT seed layer made of PZT or a TiO seed layer made of TiO.SELECTED DRAWING: Figure 10
Inventors:
NAGAHATA TAKANARI
Application Number:
JP2019015870A
Publication Date:
June 13, 2019
Filing Date:
January 31, 2019
Export Citation:
Assignee:
ROHM CO LTD
International Classes:
H01L41/319; B41J2/14; H01L41/047; H01L41/09; H01L41/318; H01L41/43
Attorney, Agent or Firm:
Patent Business Corporation Ai Patent Office