To provide a piezoelectric driving type MEMS element capable of improving production yield and reducing a cost with a simple manufacturing process.

The piezoelectric driving type MEMS element 1 is composed of: a first substrate 10 which is provided with, at a part, a movable part 16 which is to be displaced in a convex shape by being driven by a piezoelectric driving part 20 composed of a piezoelectric film 22 arranged on a region of a movable part 16 of a first substrate 10 as a part of the movable part 16 and a pair of electrodes 21, 23 arranged to sandwich the piezoelectric film 22, and which is provided with a movable electrode 25 at a surface central part of the movable part 16; and a second substrate 30 which is jointed with the first substrate 10 and supports a fixed electrode 35 facing the movable electrode 25 with a prescribed interval.