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Title:
PIEZOELECTRIC MEMS SWITCH
Document Type and Number:
Japanese Patent JP2017050174
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric MEMS switch capable of reducing the occurrence of contact failure.SOLUTION: A piezoelectric MEMS switch 100 includes: a first beam 13 deformed by a voltage application in a piezoelectric drive element; a contact terminal 15 provided to the first beam 13 and including a contact part 15b switching the connection and disconnection between signal lines by the deformation of the first beam 13; and a support member 30 supporting the contact terminal 15 from a plurality of directions. As a result, a force caused when the contact part 15b comes into contact with a second signal line 24 can be dispersed.SELECTED DRAWING: Figure 5

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Inventors:
AKIYAMA SHOTARO
Application Number:
JP2015173142A
Publication Date:
March 09, 2017
Filing Date:
September 02, 2015
Export Citation:
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Assignee:
TDK CORP
International Classes:
H01H57/00; B81B3/00
Domestic Patent References:
JP2015088339A2015-05-07
JPH11185586A1999-07-09
JP2007227353A2007-09-06
JP2006159356A2006-06-22
JP2006179384A2006-07-06
Foreign References:
US20110181150A12011-07-28
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Takashi Mikami



 
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