PIEZOELECTRIC MEMS SWITCH

Title:

PIEZOELECTRIC MEMS SWITCH

Document Type and Number:

Japanese Patent JP2017050176

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide a piezoelectric MEMS switch capable of being easily miniaturized.SOLUTION: A MEMS switch 100 includes: a first beam 13 supported by a substrate 3 in a cantilever fashion and including a separated part 13f separated from the substrate 3; a first signal line 14 on the first beam 13; grounds 16a and 16b on the first beam 13; piezoelectric drive elements 11x and 11y for deforming the first beam 13; and a contact terminal 15 provided to the first beam 13 and switching the connection and disconnection between the first signal line 14 and a second signal line 24 by the deformation of the first beam 13. As plan view, the ground lines 16a and 16b are provided to sandwich the first signal line 14, and the piezoelectric drive elements 11x and 11y are provided to be further apart from the first signal line 14 than the grounds 16a and 16b, respectively.SELECTED DRAWING: Figure 5

Inventors:

AKIYAMA SHOTARO
ENDO KENJI
AOYANAGI TAKESHI
OSANAI KATSUNORI

Application Number:

JP2015173148A

Publication Date:

March 09, 2017

Filing Date:

September 02, 2015

Export Citation:

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