To have a further stable structure by confining a diaphragm into a flow passage interrupted from the outside.
This fluid controller is provided with a first board 1, and at least one of the flow passages 7 formed by an upper surface side of the first board 1, and a second board 2 is abutted to the upper surface side, and thereby the flow passages are interrupted from the outside other than an input/output part. A first slit 9 is provided on a lateral wall of the flow passage in parallel, and thereby a part of the lateral wall of the flow passage is constituted by the elastically deformable diaphragm 3, and a piezoelectric element constituted by at least a pair of first electrodes 4 and a piezoelectric body 5 and a piezoelectric element constituted by a second electrode 6 is provided on a side surface parallel to the thickness direction of the diaphragm 3 unevenly on the flow passage side or on the first slit side in the side surface.
| JPH04357037A | 1992-12-10 | |||
| JP2003072061A | 2003-03-12 | |||
| JPH07329290A | 1995-12-19 |
Tomoyasu Sakaguchi
Hiroki Naito
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