Title:
PIEZOELECTRIC PRESSURE SENSOR
Document Type and Number:
Japanese Patent JPH05203525
Kind Code:
A
Abstract:
PURPOSE:To reduce the drift caused by an output temperature. CONSTITUTION:In a piezoelectric pressure sensor 10, a piezoelectric body 18 as a pressure sensitive element is fixed to supporting plates 38 and 40 through buffer layers 36 and 37 in a pressure container 16, wherein a pressure injecting port 28 is formed. The absolute value of the difference between the linear expansion coefficient of the material forming the piezoelectric body 18 and the linear expansion coefficient of the material forming the supporting plates 38 and 40, to which the piezoelectric body 18 is fixed, is divided by the thicknesses of the buffer layers 36 and 37, and the obtained value is made to be less than 1X10-4 deg.C.mm<-1>.
Inventors:
KUNIMURA SATOSHI
NAKAYAMA SHIRO
TAKAHASHI KATSUHIKO
IMAI TAKAYUKI
NAKAYAMA SHIRO
TAKAHASHI KATSUHIKO
IMAI TAKAYUKI
Application Number:
JP1135092A
Publication Date:
August 10, 1993
Filing Date:
January 24, 1992
Export Citation:
Assignee:
FUJIKURA LTD
International Classes:
G01L9/08; G01L23/10; (IPC1-7): G01L9/08; G01L23/10
Attorney, Agent or Firm:
Masatake Shiga