To provide a method of manufacturing a piezoelectric pump manufacturing a piezoelectric pump, which can efficiently transfer a fluid and which can prevent leakage of the fluid, with a high yield.
This method of manufacturing a piezoelectric pump includes: a first process for preparing a compound body, which includes a structure including a piezoelectric element and a first board layered on that structure, and a second board; and a second process for providing a pump chamber by joining the compound body and the second board together, arranging so that the structure faces the second board. In the second process, the compound body and the second board are joined with each other by an adhesive resin filled inside of a groove provided in the compound body and/or the second board along the periphery of the pump chamber.
SHIBATA MAKOTO
Toshifumi Onuki
Takuji Fukasawa