To provide a piezoelectric pump transferring fluid with sufficient stability.
This piezoelectric pump includes: a structure having a piezoelectric element and a support member supporting the piezoelectric element; and a first substrate and a second substrate that sandwich the structure. The piezoelectric pump has: a pump chamber surrounded by the second substrate and the structure; and a first opening and a second opening that communicate with the pump chamber. The piezoelectric element includes: a displacement part displaced by application of a voltage; and a fixed part fixed by being directly or indirectly sandwiched between the first substrate and second substrate. From a state where the first substrate is joined to the structure, the portion of the first substrate, facing the displacement part and the surrounding part of the support member surrounding the periphery of the displacement part, is removed to expose the displacement part and the surrounding part.
WADA TAKESHI
KUMAGAI MICHIHIRO
Toshifumi Onuki
Takuji Fukasawa