To prevent the occurrence of unevenness in the vibration characteristics of a vibration plate, in a piezoelectric pump to discharge gas in a constant direction through vibration of a vibration plate in which piezoelectric elements are laminated.
A vibration plate 8 in which piezoelectric elements 10 are laminated is nipped between upper and lower cases 4 and 6, of which a pump chamber consists, and when the vibration plate 8 is vibrated, gas is sucked through a suction hole 4d and gas is discharged through a discharge hole 14a. In a so formed piezoelectric pump 2, the vibration plate 8, a lower case 6, a spring washer 18, and a press plate 20 are contained, in the order, in the frame part 4e of the upper case 4, and by caulking the caulking part 4f of the end part of the frame part 4e, the parts are fixed. A pressure exerted on the vibration plate 8 from the case through the energizing force of the spring washer 18 is set to 30 Mpa or more. This constitution eliminates unevenness in the vibration characteristics of the vibration plate 8.
INOUE NOBUHIRO
ITO YASUO
KAMEYAMA TSUTOMU
KATO KIYOSHI
HONDA MOTOR CO LTD
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