PURPOSE: To provide a miniature relay array in which a piezoelectric relay is arranged to increase on-off reliability, by arranging a bimorph piezoelectric elements just like a plurality of cantilever beams or a quasi-bimorph piezoelectric element in a comb shape.
CONSTITUTION: Bimorph piezoelectric elements 32-1, 32-2,... are arranged in a comb shape with a plurality of slits 31 cut on a square bimorph piezoelectric plate 30 from one selected side in which plate 30 two sheets of piezoelectric plates are stuck with each other and a common electrode 33 is provided on one side thereof. Separate electrodes 34-1, 34-2,... are provided on the other side of each element 32 and movable contacts 37-1, 37-2,... are provided on the end part thereof. Fixed contacts 41-1, 41-2,... are provided opposite to each contact 37. Switches 19-1, 19-2,... are provided with one end thereof connected to each electrode 34 and the other end connected to the common electrode 33 through a driving power supply 18 to separately drive each element 32. When a selected switch is turned on, the corresponding piezoelectric element is warped so that the movable contact and the fixed contact comes into contact with each other.
Ueda Masanori