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Patent Searching and Data


Title:
PIEZOELECTRIC RESONATOR, AND FILM AND ELECTRONIC COMPONENT USING THE SAME
Document Type and Number:
Japanese Patent JP2005051447
Kind Code:
A
Abstract:

To suppress the degradation of a Q value while improving temperature characteristics in a piezoelectric resonator.

The piezoelectric resonator is provided with a lower electrode 24 formed on a substrate 11, a piezoelectric film 23 formed on the lower electrode 24, an upper electrode 25 which is formed on the piezoelectric film 23 and obtains a signal at a prescribed resonant frequency in cooperation with the lower electrode 24 by a bulk wave propagated inside the piezoelectric film 23; and an acoustic multilayered reflection film 28 which is composed of an SiO2 film 28a having prescribed acoustic impedance alternately laminated and formed on the upper electrode 25, and an AlN film 28b having higher acoustic impedance than the SiO2 film 28a and in which the SiO2 film 28a is in contact with the upper electrode 25 and reflects the bulk wave.


Inventors:
INOUE KENJI
SAITO HISATOSHI
Application Number:
JP2003205137A
Publication Date:
February 24, 2005
Filing Date:
July 31, 2003
Export Citation:
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Assignee:
TDK CORP
International Classes:
H01L41/09; H01L41/04; H01L41/187; H03H9/02; H03H9/17; (IPC1-7): H03H9/17; H01L41/09; H01L41/187; H03H9/02
Attorney, Agent or Firm:
Toshiro Ohata
Kiyoshi Kurihara