Title:
圧電薄膜素子、その製造方法及び圧電薄膜デバイス
Document Type and Number:
Japanese Patent JP5531653
Kind Code:
B2
Abstract:
A piezoelectric film element is provided, which is capable of improving piezoelectric properties, having on a substrate at least a lower electrode, a lead-free piezoelectric film, and an upper electrode, wherein at least the lower electrode out of the lower electrode and the upper electrode has a crystal structure of a cubic crystal system, a tetragonal crystal system, an orthorhombic crystal system, a hexagonal crystal system, a monoclinic crystal system, a triclinic crystal system, a trigonal crystal system, or has a composition in which one of these crystals exists or two or more of them coexist, and crystal axes of the crystal structure are preferentially oriented to a specific axis smaller than or equal to two axes of these crystals, and a ratio c/a' is set in a range of 0.992 or more and 0.999 or less, which is the ratio of a crystal lattice spacing c in a direction of a normal line to the substrate surface, with respect to a crystal lattice spacing a' whose inclination angle from the substrate surface is in a range of 10° or more and 30° or less.
Inventors:
Kazushi Suenaga
Kenji Shibata
Kazutoshi Watanabe
Akira Nomoto
Kenji Shibata
Kazutoshi Watanabe
Akira Nomoto
Application Number:
JP2010020922A
Publication Date:
June 25, 2014
Filing Date:
February 02, 2010
Export Citation:
Assignee:
Hitachi Metals Co., Ltd.
International Classes:
H01L41/09; H01L41/18; H01L41/187; H01L41/22; H01L41/29; H01L41/316; H01L41/319; H02N2/00
Domestic Patent References:
| JP2009295786A | ||||
| JP2006250688A | ||||
| JP2009094449A | ||||
| JP2009123974A |
Attorney, Agent or Firm:
Toru Yui
Hitoshi Kiyono
Fukuoka Masahiro
Hitoshi Kiyono
Fukuoka Masahiro