Title:
PIEZOELECTRIC THIN FILM, PIEZOELECTRIC THIN FILM ELEMENT, PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC SENSOR, HEAD ASSEMBLY, HEAD STACK ASSEMBLY, HARD DISK DRIVE, PRINTER HEAD, AND INKJET PRINTER DEVICE
Document Type and Number:
Japanese Patent JP2019121702
Kind Code:
A
Abstract:
To provide a piezoelectric thin film excellent in piezoelectric characteristics and ferroelectricity.SOLUTION: A piezoelectric thin film 3 is a piezoelectric thin film 3 including an oxide having a perovskite structure. The perovskite structure belongs to a tetragonal system. The oxide is represented by the following chemical formula 1. A (001) plane of the perovskite structure is oriented in a normal direction dn of a surface of the piezoelectric thin film 3. (1-x)(BiNa)TiO-xBaTiO(1) [In the above chemical formula 1, x satisfies 0.25≤x≤0.70.]SELECTED DRAWING: Figure 1
Inventors:
SATO YUSUKE
SATO WAKIKO
ISHIDA MIRAI
FUNAKUBO HIROSHI
HASEGAWA MIYU
SHIMIZU TAKAO
SATO WAKIKO
ISHIDA MIRAI
FUNAKUBO HIROSHI
HASEGAWA MIYU
SHIMIZU TAKAO
Application Number:
JP2018001161A
Publication Date:
July 22, 2019
Filing Date:
January 09, 2018
Export Citation:
Assignee:
TDK CORP
TOKYO INST TECH
TOKYO INST TECH
International Classes:
H01L41/187; B41J2/14; C04B35/462; C04B35/468; C23C14/08; G11B5/596; G11B5/60; G11B21/10; G11B21/21; H01L41/09; H01L41/113; H02N2/04; H02N2/18
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Takashi Mikami
Yoshiki Kuroki
Takashi Mikami