Title:
圧電薄膜積層体、圧電薄膜基板、圧電薄膜素子、圧電アクチュエータ、圧電センサ、ヘッドアセンブリ、ヘッドスタックアセンブリ、ハードディスクドライブ、プリンタヘッド、及びインクジェットプリンタ装置
Document Type and Number:
Japanese Patent JP6790776
Kind Code:
B2
Abstract:
A piezoelectric thin film-stacked body is provided. A piezoelectric thin film-stacked body has a first electrode layer, a first intermediate layer stacked on the first electrode layer, a second intermediate layer stacked on the first intermediate layer, and a piezoelectric thin film stacked on the second intermediate layer, the first intermediate layer includes K, Na, and Nb, the second intermediate layer is a layer causing stress in a compression direction in the piezoelectric thin film, and the piezoelectric thin film includes (K,Na)NbO3.
Inventors:
Masaru Nanao
Kohei Ohashi
Kenta Ishii
Kohei Ohashi
Kenta Ishii
Application Number:
JP2016237727A
Publication Date:
November 25, 2020
Filing Date:
December 07, 2016
Export Citation:
Assignee:
tdk Corporation
International Classes:
H01L41/187; B41J2/14; H01L41/09; H01L41/113
Domestic Patent References:
| JP2007287918A | ||||
| JP2015529963A | ||||
| JP2013118234A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Takashi Mikami
Yoshiki Kuroki
Takashi Mikami