Title:
圧電駆動式バルブおよび流量制御装置
Document Type and Number:
Japanese Patent JP6818357
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric drive type valve that is able to detect opening and closing states of a valve.SOLUTION: The piezoelectric drive type valve includes: a valve main body with a passage provided therein; a valve seat provided on the passage and a valve body seated on or separated from the valve seat; and a support cylinder accommodating a piezoelectric element for moving the valve body. The piezoelectric drive type valve is configured such that the support cylinder moves by extending of the piezoelectric element, and the valve body moves by the support cylinder. The piezoelectric drive type valve comprises a gap sensor having a planar sensor and an opposite member with a face opposite the planar sensor. One of the planar sensor and opposite member of the gap sensor is fixed in a position where it is immovable with respect to the valve main body; and the other is fixed to the support cylinder. A change in distance between the planar sensor and the opposite member is detected as an amount of movement of the support cylinder.SELECTED DRAWING: Figure 2
Inventors:
Ryosuke Toi
Kaoru Hirata
Katsuyuki Sugita
Koji Nishino
Shinichi Ikeda
Kaoru Hirata
Katsuyuki Sugita
Koji Nishino
Shinichi Ikeda
Application Number:
JP2017224760A
Publication Date:
January 20, 2021
Filing Date:
November 22, 2017
Export Citation:
Assignee:
Fujikin Co., Ltd.
International Classes:
G05D7/06; F16K31/02; F16K37/00
Domestic Patent References:
| JP2173484A | ||||
| JP2003120832A | ||||
| JP62222102A | ||||
| JP2013228950A |
Attorney, Agent or Firm:
Yata Ryuichi
Takeshi Sugimoto
Takeshi Sugimoto