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Title:
PIEZOELECTRIC VIBRATING PIECE, METHOD FOR MANUFACTURING PIEZOELECTRIC VIBRATING PIECE, PIEZOELECTRIC RESONATOR, OSCILLATOR, ELECTRONIC DEVICE, AND RADIO-CONTROLLED TIMEPIECE
Document Type and Number:
Japanese Patent JP2013191981
Kind Code:
A
Abstract:

To provide a piezoelectric vibrating piece that has favorable vibration properties.

A piezoelectric vibrating piece 4 includes: a pair of vibrating arms 10 and 11 that are arranged side by side; a base to which the pair of vibrating arms 10 and 11 are connected; and a pair of excitation electrodes 13 and 14 that are formed on the vibrating arms 10 and 11 electrically independently of each other and that vibrate the vibrating arms 10 and 11. A first one of the excitation electrodes 13 and 14 is formed on side wall surfaces 5b of grooves 5 that are provided in main surfaces 4a of the vibrating arms 10 and 11. A second one of the excitation electrodes 13 and 14 is formed on side surfaces 4b of the vibrating arms 10 and 11 so as to sandwich the vibrating arms 10 and 11 with the first one of the excitation electrodes 13 and 14. A portion of each groove 5 positioned nearer to a bottom wall surface 5a relative to an opening 5c is at least partially wider than the opening 5c in a short width direction of the vibrating arms 10 and 11.


Inventors:
IROKAWA TAIKI
Application Number:
JP2012055917A
Publication Date:
September 26, 2013
Filing Date:
March 13, 2012
Export Citation:
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Assignee:
SEIKO INSTR INC
International Classes:
H03H9/19; H01L41/09; H01L41/18; H01L41/22; H03B5/32; H03H3/02; H03H9/02; H03H9/215
Attorney, Agent or Firm:
Kentaro Kuhara
Noriaki Uchino
Nobuyuki Kimura