Title:
PIEZOELECTRIC VIBRATION CHIP, MANUFACTURING DEVICE OF PIEZOELECTRIC VIBRATION CHIP AND PIEZOELECTRIC DEVICE
Document Type and Number:
Japanese Patent JP3952811
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a reverse mesa AT cut piezoelectric vibration chip on which excitation electrodes can be arranged in parallel and without generating useless vibration.
SOLUTION: The reverse mesa AT cut piezoelectric vibration chip is constituted by forming reverse mesa parts 10a, 10b on the main surface on the ±Y' side of the AT cut piezoelectric vibration chip having crystal axes (X, Y', Z') respectively and arranging the excitation electrodes 20 in the respective reverse mesa parts, an end point Ra on the -Z' side in the reverse mesa part 10a is arranged on the -Z' side in comparison with an end point Ub on the -Z' side in the reverse mesa part 10b, an end point Rb on the +Z' side in the reverse mesa part 10b is arranged on the +Z' side in comparison with an end point Ua on the +Z' side in the reverse mesa part 10a and the respective excitation electrodes 20 are made arrangement in parallel.
Inventors:
Seiichiro Ogura
Application Number:
JP2002065875A
Publication Date:
August 01, 2007
Filing Date:
March 11, 2002
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H01L41/09; H03H9/19; H01L41/18; H01L41/22; H01L41/29; H03H3/04; (IPC1-7): H03H9/19; H01L41/09; H01L41/18; H01L41/22; H03H3/04
Domestic Patent References:
| JP2002033640A | ||||
| JP2001203559A |
Attorney, Agent or Firm:
Yuichi Murakami
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