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Title:
PIEZOELECTRIC VIBRATOR FOR ANGULAR VELOCITY SENSOR
Document Type and Number:
Japanese Patent JP2007212355
Kind Code:
A
Abstract:

To provide a piezoelectric vibrator for an angular velocity sensor that has a detecting section and an exciting section for exciting the detecting section and has a structure capable of improving both excitation efficiency and signal detection efficiency.

The piezoelectric vibrator for the angular velocity sensor comprises a detecting section for detecting the angular velocity of the rotation motion about the rotation center with a piezoelectric effect corresponding to Coriolis force, and the exciting section that vibrates in a torsion vibration mode about the torsion center axis crossing the rotation center axis, connects the detecting section to a first part where a predetermined torsion displacement occurs, and excites the detecting section by torsion vibration. The piezoelectric vibrator has a supporting section that comprises a piezoelectric substrate and an electrode disposed on the surface section of the piezoelectric substrate, is connected to a second part as a node of the vibration in the torsion vibration in the exciting section, and supports the exciting section.

COPYRIGHT: (C)2007,JPO&INPIT


Inventors:
KIMURA FUMIO
Application Number:
JP2006034209A
Publication Date:
August 23, 2007
Filing Date:
February 10, 2006
Export Citation:
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Assignee:
SEIKO INSTR INC
International Classes:
G01C19/56; G01C19/5607; G01C19/5642; G01C19/5705
Domestic Patent References:
JP2000310534A2000-11-07
JPH05231870A1993-09-07
JPH0222508A1990-01-25
JP2005257516A2005-09-22
JPH10300476A1998-11-13
JP2005062160A2005-03-10
JPH08278142A1996-10-22
JPH11271066A1999-10-05
JP2002022445A2002-01-23
JP2004007428A2004-01-08
JP2004251663A2004-09-09
JP2005043305A2005-02-17
Attorney, Agent or Firm:
Yoshiharu Matsushita