PILOT PRESSURE REGULATOR, SERVO VALVE, AND ACTUATOR

Title:

PILOT PRESSURE REGULATOR, SERVO VALVE, AND ACTUATOR

Document Type and Number:

Japanese Patent JP2015161349

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To reduce damage to a piezoelectric element and improve reliability.SOLUTION: A pilot pressure regulator comprises: a piezoelectric unit 6 including stacked piezoelectric elements in a casing and capable of stroking an end member 16 in a stack direction in which the piezoelectric elements are stacked; a pressure member 11 pressed by the end member 16 to be stroked in the stack direction along with the end member 16; a holder 13 accommodating therein the piezoelectric unit 6 and holding the casing 15 at least from an outer circumference side; and a nozzle 12 forming a channel between the nozzle 12 and an end portion 16a of the pressure member 11 opposite to the end member 16 for circulating a working fluid therein, the holder 13 including a first inner circumferential surface 28 forming a first gap G1 between the first inner circumferential surface 28 and an outer circumferential surface 15a of the casing 15, and second inner circumferential surfaces 29 arranged on both sides of the first inner circumferential surface 28 in the stack direction and forming second gaps G2 smaller than the first gap G1, respectively.

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Inventors:

HISAIE MAKOTO
TSURUYA MINOBU
KOBAYASHI TSUNEO
UCHIDA MITSUYA

Application Number:

JP2014036189A

Publication Date:

September 07, 2015

Filing Date:

February 27, 2014

Export Citation:

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Assignee:

MITSUBISHI HEAVY IND LTD

International Classes:

F16K31/02; F15B13/043; H01L41/053; H01L41/083; H01L41/09; H02N2/00

Domestic Patent References:

JPH06109158A	1994-04-19
JPS63280981A	1988-11-17
JPH0193680A	1989-04-12
JP2009138947A	2009-06-25
JP5232714B2	2013-07-10

Foreign References:

US20020148518A1

2002-10-17

Attorney, Agent or Firm:

Ryuichiro Mori
Masatake Shiga
Tadashi Takahashi
Tetsuo Yamazaki
Yasushi Matsunuma

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