Title:
PILOT TYPE TWO-PORT VACUUM VALVE
Document Type and Number:
Japanese Patent JP3445569
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a pilot type two-port vacuum valve capable of stably performing evacuation by increasing valve opening of a main valve stepwise, and surely preventing a turbulent flow of gas in a vacuum chamber.
SOLUTION: In this pilot type two-port type vacuum valve having the main valve and a sub-valve in a main passage and a sub-passage for connecting a chamber port 3 and a pump port 4, plural taper surfaces 6a and 6b for diametrally contracting in the closing direction are continuously formed in an outer peripheral surface of a main valve element of the main valve.
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Inventors:
Kajitani Masao
Application Number:
JP2000281715A
Publication Date:
September 08, 2003
Filing Date:
September 18, 2000
Export Citation:
Assignee:
SMC Corporation
International Classes:
F16K1/38; F16L59/06; F16K1/52; F16K31/122; F16K39/02; F16K51/02; H01L21/205; (IPC1-7): F16K31/122
Domestic Patent References:
| JP9137879A | ||||
| JP61103068A | ||||
| JP4181077A | ||||
| JP7260012A | ||||
| JP10160034A | ||||
| JP10227232A | ||||
| JP2116070U |
Attorney, Agent or Firm:
Hiroshi Hayashi (1 person outside)