Title:
PINCETTE FOR WAFER
Document Type and Number:
Japanese Patent JP2001150359
Kind Code:
A
Abstract:
To provide a pincette for wafer capable of picking up and taking out a wafer from a wafer carrier without contacting with a rear surface and a front surface of the wafer.
This pincette comprises a first holding member and a second holding member for holding an outer peripheral part of a wafer, and a control part for controlling an interval between the first holding member and the second holding member, and the first holding member and the second holding member have a V-grooved structure at their wafer holding parts.
More Like This:
JP3226351 | Sphere holding member |
JPS5318389 | WAFER HOLDING AND HANDLING DEVICE |
Inventors:
ABE KEIJI
Application Number:
JP33440999A
Publication Date:
June 05, 2001
Filing Date:
November 25, 1999
Export Citation:
Assignee:
HITACHI CABLE
International Classes:
B25B9/04; H01L21/677; H01L21/68; (IPC1-7): B25B9/04; H01L21/68
Previous Patent: BUFF AND ITS MANUFACTURING METHOD
Next Patent: FASTENING TOOL OF REINFORCING BAR JOINT FITTING
Next Patent: FASTENING TOOL OF REINFORCING BAR JOINT FITTING