Title:
ピンホール装置及び露光装置
Document Type and Number:
Japanese Patent JP6398214
Kind Code:
B2
More Like This:
Inventors:
Daisuke Mori
Application Number:
JP2014027648A
Publication Date:
October 03, 2018
Filing Date:
February 17, 2014
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G02B5/00; G01M11/02; H01L21/027
Domestic Patent References:
| JP2010510511A | ||||
| JP2009150748A | ||||
| JP2007248141A | ||||
| JP2013069892A | ||||
| JP2010020849A | ||||
| JP2011138950A | ||||
| JP2008525838A |
Foreign References:
| WO2005029164A1 | ||||
| US20050264148 |
Attorney, Agent or Firm:
Longhua International Patent Service Corporation