Title:
PIPING MEMBER FOR SEMICONDUCTOR HAVING LIMITED ETCH PIT
Document Type and Number:
Japanese Patent JPH06128701
Kind Code:
A
Abstract:
PURPOSE: To obtain a piping member for semiconductor manufacturing equipment suitable for electropolishing, excellent in corrosion resistance, and having high cleanliness.
CONSTITUTION: The member is a piping member for semiconductor equipment, which is composed of austenitic stainless steel and where the number of etch pits of >1μm length formed in an electropolishing surface is regulated to ≤2,000 pieces per unit area (1cm2). This steel has a composition consisting of, by weight ratio, ≤0.03% C, ≤1.0% Si, ≤2.0% Mn, ≤0.045% P, ≤0.004% S, 14.0-19.0% Ni, 16.0-18.0% Cr, 2.0-4.0% Mo, and the balance Fe with inevitable impurities.
Inventors:
FUKAYA TAKEKAZU
TSUJIMURA TOSHIHIKO
KAZAMA YOICHIRO
KOJO KATSUHIKO
KAWADA TSUNEHIRO
UEHARA TOSHIHIRO
TSUJIMURA TOSHIHIKO
KAZAMA YOICHIRO
KOJO KATSUHIKO
KAWADA TSUNEHIRO
UEHARA TOSHIHIRO
Application Number:
JP30596792A
Publication Date:
May 10, 1994
Filing Date:
October 19, 1992
Export Citation:
Assignee:
HITACHI METALS LTD
International Classes:
C22C38/00; C22C38/44; C22C38/58; H01L21/302; (IPC1-7): C22C38/00; C22C38/44; C22C38/58
Attorney, Agent or Firm:
Oba Mitsuru
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