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Patent Searching and Data


Title:
PIRANI GAUGE
Document Type and Number:
Japanese Patent JPH07120339
Kind Code:
A
Abstract:

PURPOSE: To increase a mechanical strength and to enlarge range of a measuring pressure of a gas by making a filament coil-shaped.

CONSTITUTION: A support 14 made of an insulating material is fixed to an inner wall of a main body 10, through which rod-shaped lead terminals 15, 16 pass. Both end parts of a winding filament 19 are fixed to the upper parts of the terminals. The lower parts of the terminals are electrically connected to terminals 12, 13 via lead wires 20, 21. Since the filament 19 is made to be a coil, a mechanical strength is increased. That is, the device is made small in size as a whole, with an increased bending strength. Accordingly, a pressure is measured in a constant state even on the side of an upper limit without instabilities in measuring values or disconnection caused when the filament 19 is vibrated. Moreover, since the mechanical strength is enhanced, diameter of the filament 19 can be reduced.


Inventors:
KAKU AKIRA
Application Number:
JP28864093A
Publication Date:
May 12, 1995
Filing Date:
October 25, 1993
Export Citation:
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Assignee:
ULVAC CORP
International Classes:
G01L21/12; (IPC1-7): G01L21/12
Attorney, Agent or Firm:
Yasuo Iisaka