To increase the arrival degree of a vacuum by providing a valve above a piston and a partition plate, in a multistage type reciprocation vacuum pump wherein a cylinder is divided into front and rear stages with a partition serving as a boundary therebetween, and the interior of each cylinder is further divided into high and low vacuum chambers by a piston.

A cylinder 5 is divided into cylinders at front and rear stages by a partition plate 8. The cylinder at a front stage is further divided into high and low vacuum chambers 6 and 8 by a piston 7 and pistons 7 and 13 are intercoupled through a single piston shaft 14 and driven. A solid lubricant 12 and a seal 11 are located between the pistons 7, 13 and the cylinder 5 to prevent the occurrence of wear due to contact of metals with each other and leakage of gas. A suction valve 1 is attached to a cylinder cover 19 to close the cylinder 6 at a front stage, a suction valve 2 to the piston 7 at a front stage, a suction valve 3 to a partition plate 9, and an exhaust valve 4 to the cylinder 5. The piston shaft 14 is linearly reciprocatively driven through a joint 15 by a crank 16 and a rotary mechanism 17.