To provide a pixel irregularity inspection method and an inspection device of a color filter for inspecting pixel irregularities of the color filter on a color filter substrate with excellent sensitivity.
The color filter on the color filter substrate is imaged, and measured data of brightness and chromaticity of each color pixel are acquired, and statistical abnormal value extraction is performed by fixing management upper and lower limits from a measured data group classified relative to each color pixel, to thereby remove an abnormal value sample if an abnormal value exists, and the statistical abnormal value extraction is performed again by fixing management upper and lower limits to a population from which the abnormal value is removed, to thereby detect abnormal value data. The operation is performed repeatedly until the abnormal value is not finally detected, and each position of the detected abnormal value data is shown by coloring or the like, to thereby classify and display determination results.
COPYRIGHT: (C)2007,JPO&INPIT
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