Title:
PLANAR ACTUATOR
Document Type and Number:
Japanese Patent JPH04325883
Kind Code:
A
Abstract:
PURPOSE: To provide an extremely minute planar actuator which is realizable with a relatively simple process where LSI technology is applied.
CONSTITUTION: An oscillation member 5, where an oscillator 8 is made at the center of a high resistant substrate both ends or one end of which is supported by beams 7, is provided, and fixed member 6, where a plurality of fixed electrodes 9 are made, is provided through a dielectric layer below the oscillator 8, thus a flexural oscillation generating means is constituted, which causes displacement of resonance mode in the oscillator 8 by generating electrostatic force between the fixed electrode 9 and the oscillator 8.
Inventors:
HORIGUCHI HIROYUKI
TAKAHASHI JUNICHI
OZAKI MOTOMI
TAKAHASHI JUNICHI
OZAKI MOTOMI
Application Number:
JP9395791A
Publication Date:
November 16, 1992
Filing Date:
April 24, 1991
Export Citation:
Assignee:
RICOH KK
International Classes:
H02N1/00; (IPC1-7): H02N1/00
Attorney, Agent or Firm:
Akira Kashiwagi