Title:
PLANAR MOTOR
Document Type and Number:
Japanese Patent JP2009077541
Kind Code:
A
Abstract:
To obtain a positioning device which can cope with the variations in cogging within a platen.
The planar motor which performs positioning of a slider by moving it to a desired position on a platen is provided with a section that performs cogging compensation of the slider, with a compensation value according to the position of the slider.
Inventors:
SAITO SHINICHI
Application Number:
JP2007244333A
Publication Date:
April 09, 2009
Filing Date:
September 20, 2007
Export Citation:
Assignee:
YOKOGAWA ELECTRIC CORP
International Classes:
H02P29/00